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Titanium oxide films were obtained successfully by sol gel route. The results of TG and DTA indicate that decomposition of sol gel proceeds in four stages. XRD results of titanium oxide film show the main diffraction peaks at 700 °C (duration = 2 h) become narrower and sharper than that prepared at lower temperature. The grain growth behavior of isothermal hold follows a more gradual process than that of heat-up.

The kinetic exponent of grain growth in the secondary recrystallization is larger than that of primarily recrystallization at 700 °C.

The fractal dimension of microstructure ceramics will be changed during different temperature and soaking times, and therefore, the fractal dimension can be taken as an index of grins growth.

Acknowledgements Authors appreciate Prof Suzuki for providing the Software of FRACTAL ANALYSIS SYSTEM, version 3.4.7, and, thanks to supporting financial by Fujian Provincial Science and Technology Department with project number of 2013H6020.


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